%PDF-1.4
%
1 0 obj
<<
/Nums [0 2 0 R]
>>
endobj
2 0 obj
<<
/S /D
>>
endobj
3 0 obj
<<
/Kids [4 0 R]
/Type /Pages
/Count 1
>>
endobj
5 0 obj
<<
/Subtype /XML
/Type /Metadata
/Length 3689
>>
stream
PScript5.dll Version 5.2.2
2016-02-10T09:23:08+01:00
2016-02-10T09:23:08+01:00
application/pdf
R:\allgemein\Technik & Dokumentation\Zeichnungen\Zeichnungen NANOTEC\ACAD-Zeichnungen\ST4118\ST4118D1804-B Layout1 (1)
schneid_a
Acrobat Distiller 8.1.0 (Windows)
uuid:346ea1c8-6277-45d7-a152-421873bf0224
uuid:97cc1860-9cc1-4805-9dfe-11e134db2b2a
endstream
endobj
6 0 obj
<<
/Metadata 5 0 R
/PageLabels 1 0 R
/Type /Catalog
/Pages 3 0 R
>>
endobj
4 0 obj
<<
/Resources 7 0 R
/Rotate 90
/Type /Page
/Contents [8 0 R 9 0 R 10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R]
/Parent 3 0 R
/MediaBox [0 0 595.22 842]
/CropBox [0 0 595.22 842]
>>
endobj
7 0 obj
<<
/ProcSet [/PDF]
/ExtGState
<<
/GS1 16 0 R
>>
>>
endobj
8 0 obj
<<
/Filter /FlateDecode
/Length 15287
>>
stream
HWˎ$W@L_ @
ZZ`WFdU=+A9큰jKܾmeea7~ۏ.5A[u-'%_t 5}l/OҸo.ƾǤ?]*{Ƿ祩C醮M}!4>b;u wX;Rן]2Ҟ()ziN+\ԿP}TJ3n{TĿD
}!ZnF[ܫ^ܒ!EM=.uqK,\\+LdĮi,yKW{Y:"rMHrxNkڞȱٰZ#WfEh5{e`)8{,*lo\:^^73ԐCU3c r3=%[ςX \iePګBCEIL;RKS-Z"L±|[{9_8 u
(i[Vh]`ܲL|pg\kؔkve[~3DwQli|ZhЎPI,+F l'xfTJ(YZsvW V0
Ɠ-ZHT橱LEv@SU[i"%WQ щ@ !zm<$NW#
S{F\=Zl,'HChH/ggGE6缞QRS%RaI )u JYQCkvGNGGjJa,J=DEh $xHx0p5IL|,"d]0d
݄Vҁl[La̼Z`wGM{F*Q5}$O8(n'jhPc7ߊV6Y QtVO[;E81!kF9SSsG$ð}iubF\,mYf+ɵު`W{lhmpCP$!i
A?b4cI8p
_M 8O)$^
[]BCcA)=̘m·rDAb3bm2!bbY"&8/ym/ףGg]O2Pk$AϯX&u) ;W~*uN3z_-97^\*@kp|1o oގn 'r5JqqMeZ'ܜ:A+˭պ'<Eؐ(ǴKqk6x]wtfBwoNZcʃC-VZS125tP/sֈ{ LW
ڎ4ApH Qt.oc ri
?ɘXZ-/Buh)N2炙iU&[_iRz;_lvVGnje+l2?|B@)z}J}[j'ˮ%#?:!*1k9cՒ` ,W:'@2˗IRfQ)ѨSuRlzSfTLյe/K[4r#2Ad!f߇`DY!?0AR%"E=qRvjj3j9 w -+.WӳY]IPbϻY]O*P+6S`|ہ{h;L]Lg|)MzJ6=jr߾,=4w9T
cĭ"]0sŕL$eNjwXY!L/~nFY
&mG֜j&mv$XpDģ9稱9LHKEd}~JO] gM;,͆-T:")Tି!Wb3o+ih#?wT^t!Vfťk
L -ĨBp }%f$rPP A]-R}lkTQnH*=AZ'
'ZەqpIYzsTZ~tvʐ.k;KCEä%?Nơ,`@7H48Բ.%n{ԥh&IA_צi^tH-b].=5<@67PaCH&Xxg[GXV[wy8M;$D%i \%\]_lXݯ6 ה zΔl^٩>n9fh,S/~W1)f67]{cB`ڦ%mVZ!G>Zwbi):# G8P\M_
hgՊ_@,eˌJ257T+^V5LtFH~߭IC<$}/#?\>bЄ{a,%Y>|NbY7e4?{)`+7^xmK Ryrԓi`'=qA<,_mFW
u|O:%=` H]%yt5۴wӅ83$
^X@n/̏Cf>;svdOx<q'-[
'ڞmb96cuecwi0k%>GK+f=moI.saCVJƖVT
E``/K1 Fi
T,4!hRcHy*pxf٢Ho<8FT٩0 }l[#>~e!1W-\Cf,Yϐ02glFz`x2)S>g3.Fle 9eq_9Vs8sLuU2vޙ[4GnϚ` yE
T1<`b-o'g[}y%|I7ٮy;X-2"+h9, ا=prFe=T}BHc]Q+S͖80aʊԈB|F~(8ĤdL-\/vPîMąv^4;a䄪yAhz ШhQ>v.$CHFğdFޞcT lu]H$DOUňlW'ZgHz^1㤥ҙҏ}e,Gqtd^.x=Pp3L'{۟ؗIA